DocumentCode
3210417
Title
Heteroepitaxial growth of InSb directly on (001) GaAs without any buffer layer using growth rate ramping by MBE
Author
Mohammadkhan, Mahdi ; Kasaei, Seyed Ahmad Mohaddes ; Mirzakuchaki, Sattar
Author_Institution
Dept. of Electr. Eng., Iran Univ. of Sci. & Technol. (IUST), Tehran, Iran
fYear
2012
fDate
15-17 May 2012
Firstpage
165
Lastpage
169
Abstract
Heteroepitaxial InSb layers were grown on semi-insulating (001) GaAs substrates without any buffer layer showing good quality and acceptable electron mobilities at both 77K and 300K. The heteroepitaxial growth was started with the lowest possible rate by slowly ramping of Indium source temperature from its idle value up to the nominal one corresponding to a growth rate of approximately a micron per hour. This procedure speeds up the production and eliminates unwanted impurities without losing much mobility as a tradeoff. Also some empirical lines fitted to previously reported data indicating that creditable 77K (300K) mobilities of heteroepitaxial InSb/GaAs layers are within 30%-80% (50%-100%) of minimum homoepitaxial mobilities, and half of our measured mobilities are well within the regions.
Keywords
III-V semiconductors; electron mobility; gallium arsenide; indium compounds; molecular beam epitaxial growth; semiconductor growth; GaAs; InSb; MBE; electron mobility; growth rate ramping; heteroepitaxial growth layer; indium source temperature; minimum homoepitaxial mobility; molecular beam epitaxy; semiinsulating substrates; temperature 300 K; temperature 77 K; Biomedical monitoring; Gallium arsenide; Molecular beam epitaxial growth; Monitoring; Buffer; Heteroepitaxy; Indium Antimonide (InSb); Molecular Beam Epitaxy (MBE);
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Engineering (ICEE), 2012 20th Iranian Conference on
Conference_Location
Tehran
Print_ISBN
978-1-4673-1149-6
Type
conf
DOI
10.1109/IranianCEE.2012.6292345
Filename
6292345
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