• DocumentCode
    3210417
  • Title

    Heteroepitaxial growth of InSb directly on (001) GaAs without any buffer layer using growth rate ramping by MBE

  • Author

    Mohammadkhan, Mahdi ; Kasaei, Seyed Ahmad Mohaddes ; Mirzakuchaki, Sattar

  • Author_Institution
    Dept. of Electr. Eng., Iran Univ. of Sci. & Technol. (IUST), Tehran, Iran
  • fYear
    2012
  • fDate
    15-17 May 2012
  • Firstpage
    165
  • Lastpage
    169
  • Abstract
    Heteroepitaxial InSb layers were grown on semi-insulating (001) GaAs substrates without any buffer layer showing good quality and acceptable electron mobilities at both 77K and 300K. The heteroepitaxial growth was started with the lowest possible rate by slowly ramping of Indium source temperature from its idle value up to the nominal one corresponding to a growth rate of approximately a micron per hour. This procedure speeds up the production and eliminates unwanted impurities without losing much mobility as a tradeoff. Also some empirical lines fitted to previously reported data indicating that creditable 77K (300K) mobilities of heteroepitaxial InSb/GaAs layers are within 30%-80% (50%-100%) of minimum homoepitaxial mobilities, and half of our measured mobilities are well within the regions.
  • Keywords
    III-V semiconductors; electron mobility; gallium arsenide; indium compounds; molecular beam epitaxial growth; semiconductor growth; GaAs; InSb; MBE; electron mobility; growth rate ramping; heteroepitaxial growth layer; indium source temperature; minimum homoepitaxial mobility; molecular beam epitaxy; semiinsulating substrates; temperature 300 K; temperature 77 K; Biomedical monitoring; Gallium arsenide; Molecular beam epitaxial growth; Monitoring; Buffer; Heteroepitaxy; Indium Antimonide (InSb); Molecular Beam Epitaxy (MBE);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Engineering (ICEE), 2012 20th Iranian Conference on
  • Conference_Location
    Tehran
  • Print_ISBN
    978-1-4673-1149-6
  • Type

    conf

  • DOI
    10.1109/IranianCEE.2012.6292345
  • Filename
    6292345