Title :
Design and fabrication of a polysilicon micro mirror with a flat surface by gold metallization
Author :
Young-Hoon Min ; Yong-Kweon Kim
Author_Institution :
Dept. of Electr. Eng., Seoul Nat. Univ., South Korea
Abstract :
A new method to obtain the flat surface in spite of the stress unbalance of the structure is proposed. The curvature of a mirror surface is due to the stress unbalance of the structure. The polysilicon structure which has largely used as micro mirror has a compressive residual stress and a negative stress gradient in general. Therefore, the surface of the micro mirror which is consists of polysilicon has a convex curvature. The net bending moment with respect to neutral surface by stress distribution determines the curvature eventually and can be removed by optimal deposition of the mirror metal which has slightly tensile stress. The concept to obtain a flat surface is shown.
Keywords :
integrated optics; internal stresses; metallisation; micro-optics; mirrors; optical design techniques; optical fabrication; silicon; tensile strength; Si; convex curvature; flat surface; gold metallization; micro mirror; mirror metal; mirror surface; negative stress gradient; net bending moment; optimal deposition; polysilicon micro mirror design; polysilicon micro mirror fabrication; residual stress; slightly tensile stress; stress distribution; stress unbalance; Adaptive optics; Compressive stress; Fabrication; Gold; Metallization; Mirrors; Optical arrays; Optical distortion; Residual stresses; Tensile stress;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689708
