Title :
Fabrication of multi electrode array structures for intra-neural stimulation: assessment of the LIGA method
Author :
Bielen, Jeroen A. ; Schmidt, Andreas W. ; Weiel, Rolf ; Rutten, Wim L C
Author_Institution :
Fac. of Electr. Eng., Twente Univ., Enschede, Netherlands
fDate :
31 Oct-3 Nov 1996
Abstract :
The fabrication of the basic structure of needle electrode arrays by means of the LIGA method is investigated. To be able to contact all needle electrodes individually, the arrays were fabricated on silicon wafers with a patterned interconnection layer. Though further improvement of the process is needed to increase yield of the very slim structures, this approach shows the feasibility of combining LIGA with silicon technology, thereby offering a useful tool for the fabrication of neural prostheses
Keywords :
arrays; bioelectric phenomena; microelectrodes; neurophysiology; prosthetics; semiconductor technology; LIGA method assessment; Si; needle electrode arrays basic stucture fabrication; neural prostheses fabrication tool; patterned interconnection layer; silicon technology; very slim structures yield increase; Biomedical electrodes; Biomedical engineering; Copper; Etching; Fabrication; Needles; Nickel; Resists; Silicon; Titanium;
Conference_Titel :
Engineering in Medicine and Biology Society, 1996. Bridging Disciplines for Biomedicine. Proceedings of the 18th Annual International Conference of the IEEE
Conference_Location :
Amsterdam
Print_ISBN :
0-7803-3811-1
DOI :
10.1109/IEMBS.1996.656947
