Analysis of the Effect of ESD on the Operation of MEMs

Author

Greason, William D.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON

fYear

2008

fDate

5-9 Oct. 2008

Firstpage

1

Lastpage

7

Abstract

The effect of charge injection due to electrostatic discharge (ESD) on the operation of capacitive micro-electromechanical systems (MEMS) structures is studied. An analysis of charge transfer for the human body model (HBM), charged device model (CDM) and field induced charged device model (FCDM) is presented. The reliability of MEMS due to trapped charge is assessed using a figure of merit based on forces due to voltage and charge states of operation and the critical charge for breakdown of dielectrics.

Keywords

charge injection; electrostatic discharge; micromechanical devices; reliability; MEMS; capacitive microelectromechanical systems structures; charge transfer; charged device model; dielectric breakdown; electrostatic discharge; field induced charged device model; figure of merit; human body model; Biological system modeling; Breakdown voltage; Capacitance; Charge transfer; Conductors; Dielectric breakdown; Electrostatic discharge; Humans; Microelectromechanical systems; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Industry Applications Society Annual Meeting, 2008. IAS '08. IEEE

Conference_Location

Edmonton, Alta.

ISSN

0197-2618

Print_ISBN

978-1-4244-2278-4

Electronic_ISBN

0197-2618

Type

conf

DOI

10.1109/08IAS.2008.104

Filename

4658892