Title :
The preparation of ITO films by DC magnetron sputtering and its application in a field emission display
Author :
Chen, W.L. ; Chen, Jun ; Yu, Jun ; Deng, S.Z. ; She, J.C. ; Xu, N.S.
Author_Institution :
Sun Yat-sen (Zhongshan) Univ., Guangzhou
Abstract :
Recent years, the research of field emission display (FED) has attracted a lot of attentions because of its high display quality. In some application occasions, double side display is needed. Indium-tin oxide (ITO) is widely used as a transparent conducting electrode in flat-panel displays because it has high electrical conductivity, high optical transparency. By using a transparent ITO electrode and a transparent cold cathode, double side FED display is possible. In this study, ITO films have been used for cathode and phosphor electrodes. The prospect of a FED with double-side display capability was demonstrated.
Keywords :
field emission displays; indium compounds; magnetrons; phosphors; sputter deposition; DC magnetron sputtering; ITO; ITO films; double side FED display; field emission display; phosphor electrodes; transparent ITO electrode; transparent cold cathode; Annealing; Cathodes; Conductivity; Electrodes; Flat panel displays; Indium tin oxide; Magnetic materials; Optical films; Sputtering; Temperature;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2007. IVNC. IEEE 20th International
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4244-1133-7
Electronic_ISBN :
978-1-4244-1134-4
DOI :
10.1109/IVNC.2007.4480999
