Title :
Highly efficient grating coupler between optical fiber and silicon-on-insulator waveguide
Author :
Jin, Yujian ; Xue, Chenyang ; Chou, Xiujian ; Cui, Danfeng ; Tong, Xiaogang
Author_Institution :
Sci. & Technol. on Electron. Test & Meas. Lab., North Univ. of China, Taiyuan, China
Abstract :
In order to increase the coupling efficiency between single mode optical fiber and SOI waveguide, in this paper we present the design of a diffractive grating structure and then get the optimal parameters which can reach 67% coupling efficiency though FDTD simulation. The grating is fabricated on the SOI waveguide by focused ion beam (FIB) lithography. Because side wall roughness caused by fabrication tolerances and extra losses finally we measured a 17.5% coupling efficiency of the grating coupler between optical fiber and silicon waveguide.
Keywords :
diffraction gratings; finite difference time-domain analysis; focused ion beam technology; integrated optics; ion beam lithography; optical design techniques; optical fibre couplers; optical fibre fabrication; optical fibre losses; silicon-on-insulator; FDTD simulation; SOI waveguide; Si; coupling efficiency; diffractive grating structure; focused ion beam lithography; highly efficient grating coupler; side wall roughness; silicon-on-insulator waveguide; single mode optical fiber; Optical coupling; Optical device fabrication; Optical diffraction; Optical fiber sensors; Optical fibers; coupling; grating; optical waveguide;
Conference_Titel :
Electronics and Optoelectronics (ICEOE), 2011 International Conference on
Conference_Location :
Dalian
Print_ISBN :
978-1-61284-275-2
DOI :
10.1109/ICEOE.2011.6013262
