Title :
Research on Skill Knowledge and Process Simulation-Based Virtual MEMS Manufacturing System
Author :
Guang-Yi Sun ; Xin Zhao ; Gui-Zhang Lu
Author_Institution :
Inst. of Robotics & Inf. Autom. Syst., Tianjin, China
Abstract :
This paper puts forward the concept of virtual MEMS manufacturing system based on skill knowledge and process simulation. Concretely, using optical lithography as the breakthrough, this paper details a virtual lithography prototyping system and key problems. In addition, the alignment simulation example of fabricating micro-acceleration indicates the feasibility of system.
Keywords :
discrete event simulation; lithography; manufacturing systems; micromechanical devices; virtual prototyping; alignment simulation; microacceleration fabrication; microelectromechanical system; optical lithography; process simulation; skill knowledge; virtual MEMS manufacturing system; virtual lithography prototyping system; Electronic mail; IEEE catalog; Lithography; Manufacturing systems; Micromechanical devices; Robotics and automation; Sun; Virtual manufacturing; Virtual prototyping; Virtual reality; Lithography; MEMS; Process Simulation; Virtual Manufacturing;
Conference_Titel :
Control Conference, 2006. CCC 2006. Chinese
Conference_Location :
Harbin
Print_ISBN :
7-81077-802-1
DOI :
10.1109/CHICC.2006.280677
