Title :
Laser injection of spot defects on integrated circuits
Author :
Velazco, R. ; Martinet, B. ; Auvert, G.
Author_Institution :
LGI, Grenoble, France
Abstract :
Random spot defects may result in discrete faults such as line breaks and short circuits. Therefore they could contribute significantly to yield losses in stable fabrication lines of VLSI integrated circuits. The authors show how to use laser based equipment to inject such faults at the circuit level. Experimental results carried out on 32 bits microprocessors are presented and point out one of the main applications of this approach: the test sequence improvement
Keywords :
VLSI; integrated circuit testing; laser beam applications; logic testing; microprocessor chips; production testing; 32 bits; VLSI; integrated circuits; line breaks; logic testing; microprocessors; random processes; short circuits; spot defects; test sequence improvement; yield losses; Aluminum; Circuit faults; Circuit testing; Gas lasers; Laser beam cutting; Laser beams; Laser theory; Manufacturing processes; Microprocessors; Very large scale integration;
Conference_Titel :
Test Symposium, 1992. (ATS '92), Proceedings., First Asian (Cat. No.TH0458-0)
Conference_Location :
Hiroshima
Print_ISBN :
0-8186-2985-1
DOI :
10.1109/ATS.1992.224415
