Title :
Structural analysis of integrated circuits using scanning laser ultrasonics
Author :
Andriamonje, Grégory ; Pouget, Vincent ; Ousten, Yves ; Lewis, Dean ; Plano, Bernard ; Danto, Yves
Author_Institution :
IXL, Bordeaux I Univ., Talence, France
Abstract :
We present an analysis of a VLSI Circuit using the picosecond ultrasonics technique. This optical non-destructive technique is based on ultrasound generation and detection by ultrashort laser pulses. The experimental setup and methodology are analyzed. The influence of the protection layer for passivated circuits on the experimental results is described. The in-depth and lateral resolutions of the technique are illustrated by experimental results.
Keywords :
VLSI; integrated circuit reliability; integrated circuit testing; measurement by laser beam; photoacoustic effect; ultrasonic materials testing; VLSI circuit; integrated circuits; optical nondestructive technique; passivated circuits; picosecond ultrasonics technique; protection layer; scanning laser ultrasonics; structural analysis; ultrasound detection; ultrasound generation; Acoustic waves; Circuit analysis; Failure analysis; Optical beams; Optical microscopy; Optical pulse generation; Optical pumping; Pulse measurements; Pump lasers; Ultrasonic imaging;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2004. 42nd Annual. 2004 IEEE International
Print_ISBN :
0-7803-8315-X
DOI :
10.1109/RELPHY.2004.1315355
