Title :
High precision result evaluation of VLSI
Author_Institution :
Matsushita Electr. Ind. Co. Ltd., Japan
Abstract :
Yield is a topic of great concern in VLSI manufacture. Still, conventional research results present only average values for the yield. The present paper discloses how the yield shows a beta distribution and how that yield can be evaluated by obtaining its cumulative probability. Furthermore, a method is introduced to calculate the systematic yield that can be obtained with relative ease even with the tester on-line. Finally, concrete examples are given where an improvement in the yield was accomplished through the use of this calculation method.
Keywords :
VLSI; binomial distribution; integrated circuit yield; IC yield; VLSI manufacture; beta distribution; cumulative probability; yield distribution; yield variance; Concrete; Distribution functions; Manufacturing industries; Poisson equations; System testing; Very large scale integration;
Conference_Titel :
Test Symposium, 2002. (ATS '02). Proceedings of the 11th Asian
Print_ISBN :
0-7695-1825-7
DOI :
10.1109/ATS.2002.1181679