An out-of-plane polysilicon actuator with a smooth vertical mirror for optical fiber switch application

Author

Mita, M. ; Miyauchi, D. ; Toshiyoshi, H. ; Fujita, H.

Author_Institution

Inst. of Ind. Sci., Tokyo Univ., Japan

fYear

1998

fDate

20-24 July 1998

Abstract

Micromachined optical switches are under intensive study for optical communication networks. Some of them require special high aspect-ratio technologies such as LIGA and deep RIE. Some are a few millimeters in size. We have designed a 2/spl times/2 micro optical switch which is micro-meters in size, fully micromachined except for one step, and has a simple mechanism because of electrostatic actuation.

Keywords

LIGA; micro-optics; micromachining; optical communication equipment; optical design techniques; optical fabrication; optical switches; sputter etching; 2/spl times/2 micro optical switch design; LIGA; deep RIE; electrostatic actuation; fully micromachined; high aspect-ratio technologies; micro-meters; micromachined optical switches; millimeters; optical communication networks; optical fiber switch application; out-of-plane polysilicon actuator; smooth vertical mirror; Communication switching; Electrodes; Electrostatic actuators; Etching; Mirrors; Optical fibers; Optical switches; Plastics; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings

Conference_Location

Monterey, CA, USA

Print_ISBN

0-7803-4953-9

Type

conf

DOI

10.1109/LEOSST.1998.689718

Filename

689718