Title :
Optical coupler fabrication on based buried field-assisted ion-exchange method
Author :
Azarinia, Hamid Reza
Author_Institution :
Dept. of Electr. Eng., Sharif Univ. of Technol., Tehran, Iran
Abstract :
A method for fabricating optical directional couplers by combining thermal and field assisted ion exchange processes is presented. Modeling, design, fabrication, and test methods are discussed. This method estimates the need for high-resolution lithography that is needed in conventional methods of computer fabrication
Keywords :
integrated optics; ion exchange; lithography; optical directional couplers; optical fabrication; buried field-assisted ion-exchange method; computer fabrication; high-resolution lithography; integrated optical circuits; modeling; optical coupler fabrication; optical directional couplers; test methods; thermal assisted ion exchange processes; Coupling circuits; Directional couplers; Glass; Lithography; Optical coupling; Optical device fabrication; Optical sensors; Optical waveguide theory; Optical waveguides; Particle beam optics;
Conference_Titel :
Industrial Electronics, 1999. ISIE '99. Proceedings of the IEEE International Symposium on
Conference_Location :
Bled
Print_ISBN :
0-7803-5662-4
DOI :
10.1109/ISIE.1999.797013
