DocumentCode :
3212801
Title :
Do ions heat up in the presheath, in the direction perpendicular to the flow? Results for a weakly collisional argon plasma
Author :
Severn, G.D. ; Hershkowitz, N.
Author_Institution :
Univ. of San Diego, San Diego, CA, USA
fYear :
2009
fDate :
1-5 June 2009
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. Laser-induced fluorescence (LIF) measurements made with a diode laser have measured the transverse metastable ion velocity distribution function profile near a negatively biased plate in a low temperature (Te < 1 eV), low pressure (p0 < 1 mTorr) DC multidipole argon discharge plasma. Results indicate that the transverse temperature doubles as the ions transit the presheath. The metastable argon ions in the 3s23p4(3P)3d 4F7/2 state are found to be characterized by a Maxwellian temperature transverse to the direction normal to the plate. For a neutral pressure of 0.3 mTorr, the transverse temperature increases along the presheath from 0.026 eV in the bulk plasma to 0.058 eV at the presheath sheath boundary. This result is compared with the PIC code simulation results of Meige et al, and with the experimental results of Claire et al.
Keywords :
argon; discharges (electric); fluorescence; ion mobility; plasma sheaths; plasma temperature; Ar; DC multidipole argon discharge plasma; LIF measurements; Maxwellian temperature; diode laser; flow direction; ion heating; laser-induced fluorescence; presheath; pressure 0.3 mtorr; sheath boundary; transverse metastable ion velocity distribution function profile; transverse temperature; weakly collisional argon plasma; Argon; Diode lasers; Distribution functions; Fluorescence; Metastasis; Plasma measurements; Plasma temperature; Pressure measurement; Temperature distribution; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on
Conference_Location :
San Diego, CA
ISSN :
0730-9244
Print_ISBN :
978-1-4244-2617-1
Type :
conf
DOI :
10.1109/PLASMA.2009.5227377
Filename :
5227377
Link To Document :
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