DocumentCode
3212927
Title
Computation and simulation of static deformation for MEMS deformable mirror
Author
Li, Jie ; Chen, Xiqu
Author_Institution
Dept. of Electr. & Inf. Eng., Wuhan Polytech. Univ., Wuhan, China
Volume
3
fYear
2011
fDate
29-31 July 2011
Abstract
The static property of a deformable mirror is discussed in this paper. The function of the deformation is obtained under some assumptions and further simplified for the mirror. From the result, it is proved to be an accurate one. At the same time the correlation between the deformation and applied voltage is put forward, providing a way for controlling the mirror.
Keywords
Galerkin method; deformation; micro-optomechanical devices; micromirrors; Galerkin method; MEMS deformable mirror; micromirrors; static deformation; Galerkin method; MEMS; deformable mirror;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and Optoelectronics (ICEOE), 2011 International Conference on
Conference_Location
Dalian
Print_ISBN
978-1-61284-275-2
Type
conf
DOI
10.1109/ICEOE.2011.6013338
Filename
6013338
Link To Document