Title :
High temperature operation of optically resonant microbeams
Author :
Herb, W.R. ; Zook, J.D. ; Wilson, M.L. ; Bassett, C.J.
Author_Institution :
Honeywell Technol. Center, Plymouth, MN, USA
Abstract :
An all-silicon, optically interrogated sensor has been demonstrated with potential for reliable operation at 450 C. The operation of a simple temperature sensor is reported here, however the basic high temperature resonant strain gauge technology may be extended to other applications.
Keywords :
micro-optics; microsensors; optical sensors; reliability; strain gauges; strain sensors; temperature measurement; 450 C; Si; all-Si optically interrogated sensor; basic high temperature resonant strain gauge technology; high temperature operation; optically resonant microbeams; reliable operation; temperature sensor; Frequency; Optical fiber sensors; Optical modulation; Optical resonators; Optical sensors; Packaging; Resonance; Silicon; Temperature sensors; Testing;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689722
