Title :
A state dependent Riccati equation filter for a rapid thermal processing system
Author :
Belikov, Sergey ; Kamali, Jalil ; Friedland, Bernard
Author_Institution :
New Jersey Inst. of Technol., Newark, NJ, USA
Abstract :
A state dependent algebraic Riccati equation filter (SDAREF) has been successfully applied to a rapid thermal processing system. SDAREF with a special parametrization of dynamics and sensor model (optical pyrometers) gives substantially better results than the extended Kalman filter
Keywords :
Riccati equations; control system synthesis; filtering theory; integrated circuit manufacture; nonlinear control systems; optical sensors; pyrometers; rapid thermal processing; dynamics; optical pyrometers; rapid thermal processing system; sensor model; state dependent Riccati equation filter; Integrated circuit modeling; Optical filters; Optical noise; Optical sensors; Rapid thermal processing; Riccati equations; Semiconductor device modeling; Sensor phenomena and characterization; Temperature measurement; Temperature sensors;
Conference_Titel :
Decision and Control, 1997., Proceedings of the 36th IEEE Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-4187-2
DOI :
10.1109/CDC.1997.657719
