Title :
Integrated micro-displacement sensor that can be incorporated into mini 3-dimensional actuator stage
Author :
Sawada, R. ; Higurashi, E. ; Itoh, T. ; Tsubamoto, M.
Author_Institution :
NTT Opto-Electron. Labs., Tokyo, Japan
Abstract :
An integrated optical micro-displacement sensor has been developed that uses the beam diverging from a laser diode. It can measure the distance traveled relative to an external reflective mirror. The measurement resolution is as low as of the order of 0.01 /spl mu/m It is 0.5 by 0.5 mm. Three of these sensors can be incorporated into the 7-mm-cubic space of a 3-dimensional actuator stage to obtain the displacements in the x, y, and z directions. This sensor basically consists of a laser diode, monolithically fabricated photodiodes, and a fluorinated polyimide waveguide for converging the light beam.
Keywords :
displacement measurement; integrated optics; integrated optoelectronics; micro-optics; microsensors; mirrors; optical fabrication; optical sensors; optical waveguides; photodiodes; semiconductor lasers; 0.5 mm; 3D actuator stage; 7 mm; beam divergence; external reflective mirror; fluorinated polyimide waveguide; integrated micro-displacement sensor; integrated optical micro-displacement sensor; laser diode; light beam convergence; measurement resolution; mini 3-dimensional actuator stage; monolithically fabricated photodiodes; Actuators; Diode lasers; Integrated optics; Laser beams; Mirrors; Optical sensors; Optical waveguides; Photodiodes; Polyimides; Space exploration;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689723
