Title :
Integrated optic distributed Bragg reflector Fabry-Perot modulator for microwave applications
Author :
Zubrzycki, W.J. ; Borges, Beatriz Vieira ; Herczfeld, Peter R. ; Kravitz, S.H. ; Hadley, G Ronald ; Vawter, G. Allen ; Corless, R.F. ; Smith, Robert E. ; Wendt, J.R. ; Word, J.C. ; Bauer, T.M.
Author_Institution :
Center for Microwave-Lightwave Eng., Drexel Univ., Philadelphia, PA, USA
Abstract :
An integrated optic Fabry-Perot modulator is considered. The device, fabricated on III-V materials, uses distributed Bragg reflectors as mirrors. The greatest technical challenge in the realization of this device was the fabrication of the gratings with nanometer feature sizes. First order gratings 0.09 /spl mu/m in width and of 0.8 /spl mu/m in depth were written on a 2 /spl mu/m wide rib waveguide and successfully etched. The design, fabrication, and performance of the device is discussed.<>
Keywords :
Fabry-Perot interferometers; integrated optics; optical communication equipment; optical fibre communication; optical fibres; optical modulation; rib waveguides; 0.09 micron; 0.8 micron; 2 micron; Fabry-Perot modulator; distributed Bragg reflector; fibre optic links; integrated optic modulator; microwave applications; nanometer feature sizes; rib waveguide; Distributed Bragg reflectors; Fabry-Perot; Gratings; III-V semiconductor materials; Integrated optics; Mirrors; Nanoscale devices; Optical device fabrication; Optical materials; Optical modulation;
Conference_Titel :
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-2581-8
DOI :
10.1109/MWSYM.1995.406042
