Title :
Diamond microstructures for optical MEMS
Author :
Bjorkman, H. ; Rangsten, P. ; Hollman, P. ; Hjort, K.
Author_Institution :
Dept. of Mater. Sci., Uppsala Univ., Sweden
Abstract :
Diamond is difficult to micromachine due to its hardness and chemical inertness. Therefore it is preferable to make use of diamond replication. The well developed area of silicon micromachining makes it possible to fabricate complicated structures that can be used as moulds for diamond. A microstructure technology for diamond replicas following the authors process flow scheme below is given. Different silicon microstructures have been manufactured by standard bulk micromachining processes i.e. lithography, wet etching, and dry etching, to evaluate diamond replication.
Keywords :
crystal microstructure; diamond; etching; lithography; micro-optics; micromachining; micromechanical devices; optical fabrication; C; Si; chemical inertness; diamond microstructures; diamond replicas; diamond replication; dry etching; lithography; microstructure technology; moulds; optical MEMS; process flow scheme; silicon micromachining; silicon microstructures; standard bulk micromachining processes; wet etching; Etching; Micromechanical devices; Microstructure; Optical films; Optical materials; Rough surfaces; Semiconductor materials; Silicon; Surface roughness; Thermal conductivity;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689734
