Title :
Technique to improve flatness of MEM backplanes
Author :
Seunarine, K. ; Underwood, I.
Author_Institution :
Dept. of Electr. Eng., Edinburgh Univ., UK
Abstract :
All reflective optical devices fabricated on silicon require flat backplanes. Unfortunately the thermal processing, which is essential in the manufacture of such devices, causes the silicon die to become warped. This backplane warping produces spurious phase modulation effects when the devices are used in coherent applications. Our investigations have been carried out on liquid crystal over silicon (LCOS) SLMs.
Keywords :
liquid crystal devices; micro-optics; micromechanical devices; optical backplanes; optical fabrication; spatial light modulators; MEM backplanes flatness; backplane warping; coherent applications; liquid crystal over Si spatial light modulators; reflective optical devices; silicon die warping; spurious phase modulation effects; thermal processing; Aluminum; Assembly; Backplanes; Geometry; Glass; Liquid crystals; Mirrors; Optical interferometry; Resists; Silicon compounds;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689735
