Title :
Characterization Of New A-Si:H Detectors Fabricated From Amorphous Silicon Deposited At High Rate By Helium Enhanced PECVD
Author :
Pochet, T. ; Ilie, A. ; Foulon, F. ; Equer, B.
Author_Institution :
CEA-Technologies
fDate :
31 Oct-6 Nov 1993
Keywords :
Alpha particles; Amorphous silicon; Electric variables; Fabrication; Helium; Optical materials; Space charge; Voltage; X-ray detection; X-ray detectors;
Conference_Titel :
Nuclear Science Symposium and Medical Imaging Conference, 1993., 1993 IEEE Conference Record.
Print_ISBN :
0-7803-1487-5
DOI :
10.1109/NSSMIC.1993.701702
