Towards an integrated sub-nanogram mass measurement system

This paper reports on developing the working prototype of a miniaturized mass measurement system for measurements of object´s mass in the range of nanograms, in liquid and gaseous environments, using commercially available CMOS-compatible micromachining technology. When used in liquid environment, the device will be able to determine bio-masses of biological cells. The entire system will comprise of a four components, that will be integrated onto a single silicon substrate, using silicon CMOS-compatible micromachining technology and hybrid assembly technique: (a) micromachined resonant structures for mass measurement, (b) resonance sensors with associated electronics circuitry, (c) micromachined planar coil, (d) miniaturized electromagnet device