Title :
Offset compensation of capacitive sensors for electrostatic microactuators
Author :
Min, Dong-Ki ; Jeon, Jong Up
Author_Institution :
MEMS Lab., Samsung Adv. Inst. of Technol., South Korea
Abstract :
An offset problem caused by the static parasitic capacitors is analyzed and then some techniques to reduce their effect on the capacitive position sensor are represented. Using a charge balancing technique, the offset problem is compensated. By adjusting the magnitudes of the modulating signals, the charge imbalance between electrodes caused by the parasitic capacitors is eliminated without sensor gain variation. Simulation results are given to validate the proposed compensation technique
Keywords :
capacitive sensors; compensation; electrodes; electrostatic actuators; position measurement; capacitive position sensor; capacitive sensors; charge balancing technique; charge imbalance; compensation technique; electrostatic microactuators; modulating signals magnitude adjustment; offset compensation; parasitic capacitors; sensor gain variation; static parasitic capacitors; Capacitive sensors; Capacitors; Circuits; Demodulation; Electrodes; Electrostatic actuators; Microactuators; Parasitic capacitance; Phase modulation; Voltage;
Conference_Titel :
Industrial Electronics, 2001. Proceedings. ISIE 2001. IEEE International Symposium on
Conference_Location :
Pusan
Print_ISBN :
0-7803-7090-2
DOI :
10.1109/ISIE.2001.932043
