DocumentCode
3218314
Title
Sensitive SWCNTs gas sensor fabricated on a flexible parylene-C substrate
Author
Xinghui Li ; Selvarasah, S. ; Yu Liu ; Chih-Feng Yang ; Dokmeci, M.R.
Author_Institution
Vacuum Electron. Nat. Lab., Beijing Vacuum Electron. Res. Inst., Beijing, China
fYear
2010
fDate
14-16 Oct. 2010
Firstpage
417
Lastpage
418
Abstract
In this paper, we present a flexible and robust SWCNTs based highly sensitive chemiresistor sensor for environmental monitoring applications. Parylene-C is utilized as the substrate in making our flexible sensors. Parylene-C is a light-weight, stress-free, transparent and inert film, is amenable to microfabrication, hence makes a suitable substrate for making flexible nanosensors.
Keywords
carbon nanotubes; gas sensors; nanosensors; Parylene-C substrate; chemiresistor sensor; environmental monitoring; flexible sensor; microfabrication; sensitive SWCNT gas sensor; single walled carbon nanotube; Methanol;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location
Nanjing
Print_ISBN
978-1-4244-6645-0
Type
conf
DOI
10.1109/IVESC.2010.5644305
Filename
5644305
Link To Document