Micromachined 2-D array piezoelectrically actuated flextensional transducers

Author

Percin, G. ; Yakub, Butrus T Khuri

Author_Institution

Edward L. Ginzton Lab., Stanford Univ., CA, USA

Volume

2

fYear

1997

fDate

5-8 Oct 1997

Firstpage

959

Abstract

This paper presents micromachined two dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report an an optimum design for an individual array element based on finite element modelling (FEM). We manufacture the transducer in two dimensional arrays using planar silicon micromachining. Such an array could be combined with an on-board driving and an addressing circuitry

Keywords

finite element analysis; micromachining; piezoelectric actuators; piezoelectric transducers; ultrasonic transducer arrays; Si; circular membrane; finite element model; flextensional transducer; piezoelectric actuation; piezoelectric ring; planar silicon micromachining; sound generation; two-dimensional array; Acoustic transducers; Biomedical transducers; Biomembranes; Differential equations; Piezoelectric transducers; Resonant frequency; Silicon; Ultrasonic imaging; Ultrasonic transducers; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.661739

Filename

661739