Title :
Micromachined 2-D array piezoelectrically actuated flextensional transducers
Author :
Percin, G. ; Yakub, Butrus T Khuri
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
This paper presents micromachined two dimensional array flextensional transducers that can be used to generate sound in air or water. Individual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report an an optimum design for an individual array element based on finite element modelling (FEM). We manufacture the transducer in two dimensional arrays using planar silicon micromachining. Such an array could be combined with an on-board driving and an addressing circuitry
Keywords :
finite element analysis; micromachining; piezoelectric actuators; piezoelectric transducers; ultrasonic transducer arrays; Si; circular membrane; finite element model; flextensional transducer; piezoelectric actuation; piezoelectric ring; planar silicon micromachining; sound generation; two-dimensional array; Acoustic transducers; Biomedical transducers; Biomembranes; Differential equations; Piezoelectric transducers; Resonant frequency; Silicon; Ultrasonic imaging; Ultrasonic transducers; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.661739
