Computer modeling techniques for microstructures

The paper describes a general design tool that can be used for small and extra small electric and magnetic devices, aiming at producing micro-motions. Micro machines can be defined as very small devices in the millimeter and sub-millimeter range. Due to the dimensions and specially as one of the dimensions is large with respect to the other, a three dimensional analysis of the field is required. When the dimensions of the electromagnetic devices become smaller, it can be shown that the electrostatic forces scale advantageously when compared to the magnetic forces. Therefore, when dealing with motion systems in the extra small area, both electric and magnetic devices are found. A design system aiming at assisting the engineer, has to be capable to handle both types of problems