DocumentCode :
3218833
Title :
Measurement and analysis of advanced field emission cold cathodes
Author :
Sule, N. ; Scharer, J. ; Booske, J. ; Vlahos, Vasilios
Author_Institution :
Univ. of Wisconsiin Madison, Madison, WI, USA
fYear :
2009
fDate :
1-5 June 2009
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. Field emission from cold copper knife-edge cathodes was experimentally studied by measuring emission currents on the Madison cathode experiment (MACX) in UHV with a base pressure of 10-10 Torr. The cathode was machined first using EDM to produce raised ridges or knife-edges of 0.13 mm width and 0.75 mm depth. The knife-edge width was further reduced by chemically etching it to 15 ?m. The anode-cathode gap is continuously variable from 0-10 mm with 0.50 mm accuracy. In addition, the cathode can be moved in the 2-D transverse direction with an accuracy of 0.004 mm. The MACX facility also provides the ability to heat the cathode from 300-600 K while accurately measuring electron emission currents from hundreds of mA to ~2 nA. Matching of the experimental results to the transfer matrix method (TMM) model has been utilized to determine the work function and knife edge surface field enhancement factor. The results indicate a modest discrepancy in the intermediate field region, which we hypothesize is due to the variation of effective fractional emission area with applied electric field. A point-by-point matching of the TMM simulation with experimental data yields an inferred variation of emission area with applied field. Further emission current distribution measurements were done in the high field (Fowler-Nordheim) emission regime. There is a substantial increase (x140 at 10 KV) in the total field emission current observed with the thinner knife-edge, chemically etched cathode. Using a Faraday cup with a micro-current measurement aperture of 0.5 mm diameter, we measured the spatial distribution of emission current by scanning the lateral dimension across the cathode. The cathode was moved transversally by a vacuum micro-positioner such that the knife-edge was moved past the 0.5 mm aperture. At voltages of 7 kV and above, two (unequal) peaks in emission can be seen, at lateral displacement locations of 1.08 and 2.6 mm. This spacing of - .5 mm of the two emission peaks corresponds to the distance between the knife-edges on the cathode confirming that the high field enchancement (?) regions on the cathode dominate the emission current in the field emission regime. We will present results that further examine the spatial variation of the micro-current distribution with applied field and temperature, enabling an experimental investigation of the local field enhancement and effective emission area variations.
Keywords :
Faraday effect; cathodes; electron field emission; etching; micropositioning; vacuum microelectronics; work function; 2-D transverse direction; EDM; Faraday cup; Fowler-Nordheim emission; MACX facility; UHV; anode-cathode gap; chemical etching; cold copper knife-edge cathodes; electron emission currents; field emission; knife edge surface field enhancement factor; microcurrent measurement; point-by-point matching; size 0.13 mm; size 0.5 mm; size 0.75 mm; temperature 300 K to 600 K; transfer matrix method; vacuum micropositioner; voltage 10 kV; voltage 7 kV; work function; Apertures; Cathodes; Chemicals; Copper; Current distribution; Current measurement; Electron emission; Etching; Pressure measurement; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science - Abstracts, 2009. ICOPS 2009. IEEE International Conference on
Conference_Location :
San Diego, CA
ISSN :
0730-9244
Print_ISBN :
978-1-4244-2617-1
Type :
conf
DOI :
10.1109/PLASMA.2009.5227657
Filename :
5227657
Link To Document :
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