• DocumentCode
    3219382
  • Title

    Synthesis and characteristics of large area graphene on SiC

  • Author

    Ley, L.

  • Author_Institution
    Inst. of Condensed Matter Phys., Univ. of Erlangen, Erlangen, Germany
  • fYear
    2010
  • fDate
    14-16 Oct. 2010
  • Firstpage
    50
  • Lastpage
    50
  • Abstract
    This paper discusses synthesis of homoepitaxial graphene on the polar surfaces of silicon carbide.The growth involves a number of annealing steps of SiC single crystal wafers in hydrogen and argon atmospheres and results in the homogeneous coverage of whole wafers. Hydrogen intercalation removes the interface layer with drastic and desirable results for the electronic properties of graphene including a reversal in the spontaneous doping polarity. Transport properties including room temperature QHE and a nascent ballistic transport device are also discussed.
  • Keywords
    annealing; ballistic transport; doping; epitaxial layers; graphene; hydrogen; intercalation compounds; quantum Hall effect; C-H; SiC; annealing; argon atmosphere; electronic properties; homoepitaxial graphene; hydrogen atmosphere; hydrogen intercalation; nascent ballistic transport device; polar surface; room temperature QHE; single crystal wafers; spontaneous doping polarity; temperature 293 K to 298 K;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
  • Conference_Location
    Nanjing
  • Print_ISBN
    978-1-4244-6645-0
  • Type

    conf

  • DOI
    10.1109/IVESC.2010.5644359
  • Filename
    5644359