DocumentCode
3219382
Title
Synthesis and characteristics of large area graphene on SiC
Author
Ley, L.
Author_Institution
Inst. of Condensed Matter Phys., Univ. of Erlangen, Erlangen, Germany
fYear
2010
fDate
14-16 Oct. 2010
Firstpage
50
Lastpage
50
Abstract
This paper discusses synthesis of homoepitaxial graphene on the polar surfaces of silicon carbide.The growth involves a number of annealing steps of SiC single crystal wafers in hydrogen and argon atmospheres and results in the homogeneous coverage of whole wafers. Hydrogen intercalation removes the interface layer with drastic and desirable results for the electronic properties of graphene including a reversal in the spontaneous doping polarity. Transport properties including room temperature QHE and a nascent ballistic transport device are also discussed.
Keywords
annealing; ballistic transport; doping; epitaxial layers; graphene; hydrogen; intercalation compounds; quantum Hall effect; C-H; SiC; annealing; argon atmosphere; electronic properties; homoepitaxial graphene; hydrogen atmosphere; hydrogen intercalation; nascent ballistic transport device; polar surface; room temperature QHE; single crystal wafers; spontaneous doping polarity; temperature 293 K to 298 K;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location
Nanjing
Print_ISBN
978-1-4244-6645-0
Type
conf
DOI
10.1109/IVESC.2010.5644359
Filename
5644359
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