DocumentCode :
3219394
Title :
Field emitter array cathodes for high current density, high current applications
Author :
Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.
Author_Institution :
SRI Int., Menlo Park, CA, USA
fYear :
2004
fDate :
27-29 April 2004
Firstpage :
257
Abstract :
Summary form only given. Microfabricated field emitter array (FEA) cathodes have demonstrated the potential to provide kA/cm2 current densities with long lifetimes in continuous or repetitively pulsed modes of operation. However, FEA cathodes have historically not achieved their full potential due to imperfect spatial uniformity of emission. We are addressing this issue with an in situ cathode processing technique that has been shown to both clean emitter tips and dramatically improve the spatial uniformity of emission. We believe that with continued process development, these arrays can a achieve total emission current of 1 A at current densities exceeding 100 A/cm2. This talk summarizes the results of our cathode processing studies and discusses possible avenues of future research to enhance FEA performance.
Keywords :
cathodes; current density; field emitter arrays; micromachining; 1 A; emission current; emission spatial uniformity; emitter tip cleaning; field emitter array cathodes; high current density emission; in situ cathode processing technique; microfabricated FEA cathodes; Cathodes; Current density; Field emitter arrays;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
Print_ISBN :
0-7803-8261-7
Type :
conf
DOI :
10.1109/IVELEC.2004.1316302
Filename :
1316302
Link To Document :
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