• DocumentCode
    3219394
  • Title

    Field emitter array cathodes for high current density, high current applications

  • Author

    Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.

  • Author_Institution
    SRI Int., Menlo Park, CA, USA
  • fYear
    2004
  • fDate
    27-29 April 2004
  • Firstpage
    257
  • Abstract
    Summary form only given. Microfabricated field emitter array (FEA) cathodes have demonstrated the potential to provide kA/cm2 current densities with long lifetimes in continuous or repetitively pulsed modes of operation. However, FEA cathodes have historically not achieved their full potential due to imperfect spatial uniformity of emission. We are addressing this issue with an in situ cathode processing technique that has been shown to both clean emitter tips and dramatically improve the spatial uniformity of emission. We believe that with continued process development, these arrays can a achieve total emission current of 1 A at current densities exceeding 100 A/cm2. This talk summarizes the results of our cathode processing studies and discusses possible avenues of future research to enhance FEA performance.
  • Keywords
    cathodes; current density; field emitter arrays; micromachining; 1 A; emission current; emission spatial uniformity; emitter tip cleaning; field emitter array cathodes; high current density emission; in situ cathode processing technique; microfabricated FEA cathodes; Cathodes; Current density; Field emitter arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference, 2004. IVEC 2004. Fifth IEEE International
  • Print_ISBN
    0-7803-8261-7
  • Type

    conf

  • DOI
    10.1109/IVELEC.2004.1316302
  • Filename
    1316302