DocumentCode :
3219617
Title :
Diagnosis of a plasma in plasma-sheath resonance
Author :
Annaratone, Beatrice Maria
Author_Institution :
Dept. of Eng. Sci., Oxford Univ., UK
fYear :
1997
fDate :
35486
Firstpage :
42430
Lastpage :
42432
Abstract :
In this contribution we propose a study of a new operation mode of radio-frequency plasma reactors for low pressure material processing. Pressures of the order of, or under, a Pascal are increasingly utilised, because of the absence of collisional effects in the sheath. However, two major obstacles have limited the development towards low pressure range: the low processing rate and the difficulty of coupling power to a hardly collisional system. Both these points could be addressed using the standard parallel plate radiofrequency reactor, which is the most commonly utilised type, in a different operational regime. The new reactor is driven at least in part, at a frequency which corresponds to the plasma-sheath resonance. This resonance has been studied in connection with the RF probe in DC plasmas
Keywords :
plasma sheaths; RF probe; collisional effects; low pressure material processing; operation mode; parallel plate radiofrequency reactor; plasma; plasma-sheath resonance; processing rate; radio-frequency plasma reactors;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Measurement and Plasmas (Digest No: 1997/088), IEE Colloquium on
Conference_Location :
London
Type :
conf
DOI :
10.1049/ic:19970513
Filename :
643815
Link To Document :
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