Title :
Carbon based high performance doping-free nanoelectronic and optoelectronic devices
Author_Institution :
Dept. of Electron., Peking Univ., Beijing, China
Abstract :
Summary form only given. Ballistic n-type carbon nanotube (CNT) based field-effect transistors (FETs) have been fabricated by contacting semiconducting single wall CNTs using Sc. Together with the demonstrated ballistic p-type CNT FETs using Pd contacts, this closes the gap for doping free fabrication of CNT based ballistic CMOS and high performance optoelectronic devices. The feasibility of this doping free CMOS technology has been demonstrated by fabricating a simple CMOS inverter on a SiO2/Si substrate, but in principle much more complicated CMOS circuits may be integrated on a CNT on any suitable insulator substrate. This CNT based CMOS technology only requires the patterning of arrays of parallel semiconducting CNTs with moderately narrow diameter range, e.g. 1.6-2.4nm, instead of the more stringent chirality control on the CNT. This may lead to the integration of CNT based CMOS devices or entire carbon based circuit with increasing complexity and possibly find its way into many possible applications, including logic and optoelectronic circuits.
Keywords :
CMOS integrated circuits; carbon nanotubes; chirality; field effect transistors; invertors; nanoelectronics; nanotube devices; optoelectronic devices; palladium; scandium; semiconductor materials; C-Cs; C-Pd; CMOS circuits; CMOS inverter; Pd contacts; Si; Si-SiO2; ballistic n-type carbon nanotube; ballistic p-type CNT FET; carbon based circuit; carbon based high performance doping-free nanoelectronic devices; carbon based high performance doping-free optoelectronic devices; chirality control; doping free CMOS technology; field-effect transistors; insulator substrate; semiconducting single wall CNT; size 1.6 nm to 2.4 nm; CMOS integrated circuits; CMOS technology;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644371