Experimental studies of SAW and STW acceleration sensitivity

Comparative studies of the normal acceleration sensitivities of 360 MHz SAW and STW two-port resonators have been performed. The resonators were fabricated on the same ST-cut wafer to insure the clearest comparison. The results show that the normal acceleration sensitivities of both types of devices can easily be improved one order magnitude by selecting the appropriate aspect-ratio of the device substrate and/or mounting system. Based on these results, the normal acceleration sensitivities of the STW resonators have been further improved through modifications to the existing resonators, resulting in normal acceleration sensitivity as low as 2.93×10^-10/g. The measured values of the STW normal acceleration sensitivities are compared to that calculated for the case of simple supports along rectangular edges