An analysis of the dynamic behavior and acceleration sensitivity of a SAW resonator supported by flexible beams

A numerical analysis is performed of the normal acceleration sensitivity and the low frequency dynamic vibration response of a SAW resonator supported by flexible beams of various geometries. The acceleration sensitivity problem is solved using Tiersten´s perturbation theory for small fields superposed on a static bias in combination with a very accurate solution to the general two dimensional surface wave equations of Sinha and Tiersten. The static biasing states under normal acceleration are obtained using three dimensional finite element models which are generated and solved using recently developed FEA software. The frequency shift under normal acceleration is computed using a rigorous and precise integration algorithm which allows an analytical surface wave mode shape to be combined with a discrete finite element solution to obtain the first perturbation of the eigen-value. A modal analysis of the SAW substrate and support beam assembly is also performed using the FEA software