Title :
A study of non-gated Carbon nanotube field emission arrays with minimized screening effect
Author :
Mingqing Ding ; Changqing Chen ; Guodong Bai ; Hanyan Li ; Jinjun Feng
Author_Institution :
Vacuum Electron. Nat. Lab., Beijing Vacuum Electron. Res. Inst., Beijing, China
Abstract :
In this paper, a non-gated carbon nanotube (CNT) field emission arrays with minimized screening effect was designed. A technique called aperture reduction was developed to overcome bottleneck effect in a non-gated CNT field emission arrays. In this technique, a sacrificial layer was deposited with a few steps and increased glancing angles.
Keywords :
carbon nanotubes; cathodes; current density; electron beam deposition; electron beam lithography; electron field emission; elemental semiconductors; photolithography; semiconductor growth; vacuum microelectronics; C; aperture reduction; aperture size; bottleneck effect; carbon nanotube field emission cathodes; carbon nanotube growth area; current density; densely packed carbon nanotubes; electric field screening effect; electron beam lithographic method; field screening effect reduction; fixed glancing angle; nongated carbon nanotube field emission arrays; optical lithographic method;
Conference_Titel :
Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-6645-0
DOI :
10.1109/IVESC.2010.5644408
