Title :
First operation of compact SR ring "AURORA-2S"
Author_Institution :
R&D Center, Sumitomo Heavy Ind. Ltd., Tanashi, Japan
Abstract :
A compact synchrotron light source has been being developed since mid 1980´s from the viewpoint of optimization for industrial use, especially for X-ray lithography. The original ring named AURORA, being in routine operation at Ritsumeikan University from 1996, was designed under the trends of those days in applying superconducting technology to such the small SR rings. There are two variations in the second AURORA, which has a racetrack shape. One is AURORA-2S (A2S) designed towards X-ray lithography regarded as a successor of the first, and the other AURORA-2D (A2D) to be appropriate for various scientific researches by its capability of placing two insertion devices in the elongated straight section.
Keywords :
X-ray lithography; X-ray production; synchrotron radiation; synchrotrons; AURORA-2S; X-ray lithography; compact SR ring; insertion device; superconducting magnet; synchrotron light source; Constitution; Light sources; Protection; Research and development; Strontium; Superconducting magnets; Synchrotrons; Temperature; Testing; X-ray lithography;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location :
Yokohama, Japan
Print_ISBN :
4-930813-97-2
DOI :
10.1109/IMNC.1999.797454
