Novel process for fabricating nanodevices consisting of carbon nanotubes

Author

Nishijima, Hidehiro ; Akita, Seiji ; Nakayama, Yoshikazu

Author_Institution

Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan

fYear

1999

fDate

6-8 July 1999

Firstpage

42

Lastpage

43

Abstract

Carbon nanotubes are well known to have high aspect ratios, such as nanometer order diameter and micrometer order length, and small tip radii with a sharp cone. In this work we have developed microprocesses of nanotubes for fabricating the nanotube probes and other nanotube devices. The processes involve the preparation of a nanotube cartridge and the transportation, welding and fixation by carbon deposition for nanotubes.

Keywords

carbon nanotubes; fullerene devices; nanotechnology; C; carbon deposition; carbon nanotubes; fabrication; fixation; high aspect ratios; micrometer order length; microprocesses; nanodevices; nanometer order diameter; nanotube cartridge; nanotube devices; nanotube probes; nanotubes; tip radii; welding; Carbon nanotubes; Electric fields; Electrokinetics; Nanotube devices; Physics; Probes; Robustness; Scanning electron microscopy; Semiconductor nanotubes; Welding;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International

Conference_Location

Yokohama, Japan

Print_ISBN

4-930813-97-2

Type

conf

DOI

10.1109/IMNC.1999.797467

Filename

797467