Title :
Novel process for fabricating nanodevices consisting of carbon nanotubes
Author :
Nishijima, Hidehiro ; Akita, Seiji ; Nakayama, Yoshikazu
Author_Institution :
Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan
Abstract :
Carbon nanotubes are well known to have high aspect ratios, such as nanometer order diameter and micrometer order length, and small tip radii with a sharp cone. In this work we have developed microprocesses of nanotubes for fabricating the nanotube probes and other nanotube devices. The processes involve the preparation of a nanotube cartridge and the transportation, welding and fixation by carbon deposition for nanotubes.
Keywords :
carbon nanotubes; fullerene devices; nanotechnology; C; carbon deposition; carbon nanotubes; fabrication; fixation; high aspect ratios; micrometer order length; microprocesses; nanodevices; nanometer order diameter; nanotube cartridge; nanotube devices; nanotube probes; nanotubes; tip radii; welding; Carbon nanotubes; Electric fields; Electrokinetics; Nanotube devices; Physics; Probes; Robustness; Scanning electron microscopy; Semiconductor nanotubes; Welding;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location :
Yokohama, Japan
Print_ISBN :
4-930813-97-2
DOI :
10.1109/IMNC.1999.797467
