Title :
Novel optical probing system for quarter-μm VLSI circuits
Author :
Ozaki, K. ; Sekiguchi, H. ; Wakana, S. ; Goto, Y. ; Umehara, Y. ; Matsumoto, J.
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
An e-beam tester is widely used for the internal analysis of LSI circuits. However, its low waveform acquisition speed is a significant drawback for LSI circuits featuring high integration and high speed. We have introduced a novel optical probing system applicable to quarter-μm VLSI circuits. Based on an electro-optic sampling technique, this probing system achieved a sub-μm spatial resolution by utilizing the scanning force microscope technique. This system can measure internal signal waveforms of VLSI circuits much faster than e-beam testers, and can measure the DC voltage level, which is not possible with e-beam testers
Keywords :
CMOS memory circuits; SRAM chips; VLSI; atomic force microscopy; electro-optical devices; integrated circuit testing; voltage measurement; DC voltage level; DC voltage measurement; e-beam tester; electro-optic sampling; internal analysis; internal signal waveforms; optical probing; positioning; quarter-μm VLSI circuits; scanning force microscope; sub-μm spatial resolution; temporal resolution; waveform acquisition; waveform acquisition speed; Circuit analysis; Circuit testing; High speed optical techniques; Integrated circuit measurements; Large scale integration; Microscopy; Sampling methods; Spatial resolution; System testing; Very large scale integration;
Conference_Titel :
Test Symposium, 1997. (ATS '97) Proceedings., Sixth Asian
Conference_Location :
Akita
Print_ISBN :
0-8186-8209-4
DOI :
10.1109/ATS.1997.643960
