Title :
Interaction of F/sub 2/ excimer laser light with various types of synthetic SiO/sub 2/ glasses: towards the 3rd generation of synthetic silica
Author :
Hosono, H. ; Mizuguchi, M. ; Ogawa, T.
Author_Institution :
Mater. & Struct. Lab., Tokyo Inst. of Technol., Japan
Abstract :
The authors consider the VUV-UV optical transmission spectra of synthetic silica specimens before and after F/sub 2/ laser irradiation. The absorption edge in the specimens differs from sample to sample: the absorption edge of the F-doped specimen is located at a shorter wavelength (153 nn) compared with the wet SiO/sub 2/ (155 nm) or the dry SiO/sub 2/ (157nm).
Keywords :
absorption coefficients; fluorine; glass; laser beam effects; silicon compounds; ultraviolet spectra; 153 to 157 nm; F-doped specimen; F/sub 2/ excimer laser light; F/sub 2/ laser irradiation; SiO/sub 2/; SiO/sub 2/:F; VUV-UV optical transmission spectra; absorption edge; synthetic SiO/sub 2/ glasses; synthetic silica; Absorption; Glass; Optical losses; Optical pulses; Optical reflection;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location :
Yokohama, Japan
Print_ISBN :
4-930813-97-2
DOI :
10.1109/IMNC.1999.797474
