Title :
Space charge and breakdown of poly-p-xylylene thin film
Author :
Mizutani, T. ; Mori, T. ; Matsuoka, T.
Author_Institution :
Dept. of Electr. Eng., Nagoya Univ., Japan
Abstract :
The breakdown strength of PPX (poly-p-xylylene) and space charge effects have been investigated. Temperature and thickness dependences of the breakdown strength of PPX supported avalanching as the breakdown mechanism. This is consistent with the results on high-field conduction of PPX. The prestress effect revealed a large influence of space charge on the breakdown strength of PPX, and dependence on the rest time was observed as well
Keywords :
dielectric thin films; electric breakdown of solids; electronic conduction in insulating thin films; high field effects; insulating thin films; organic insulating materials; polymer films; space charge; avalanching; breakdown strength; high-field conduction; poly-p-xylylene thin film; prestress effect; space charge effects; temperature dependence; thickness dependences; Breakdown voltage; Current measurement; Electric breakdown; Electrodes; Insulation; Optical films; Space charge; Temperature dependence; Temperature measurement; Transistors;
Conference_Titel :
Conduction and Breakdown in Solid Dielectrics, 1992., Proceedings of the 4th International Conference on
Conference_Location :
Sestri Levante
Print_ISBN :
0-7803-0129-3
DOI :
10.1109/ICSD.1992.225016
