Title :
A methodology for process design simulators of MEMS based on VRML and Java
Author_Institution :
ENSPS/ERM/PHASE, Ilkirch, France
Abstract :
The paper presents an efficient way to produce pedagogical, fully interactive and animated 3D process design simulators for MEMS. The aim of such simulators is to make the student learn the logical suite of process design steps that have to be taken to produce correct MEMS. By means of VRML, the learner can visualize the studied MEMS device at any stage of its fabrication from any angle. The associated Java program checks that the actions performed by the student are done in the right order with respect to time.
Keywords :
Java; computer based training; electronic design automation; electronic engineering education; micromechanical devices; virtual reality languages; Java; MEMS; VRML; animated 3D process design simulators; process design simulators; process design steps; students; Animation; Computational modeling; Education; Fabrication; Internet; Java; Microelectromechanical devices; Micromechanical devices; Process design; Virtual reality;
Conference_Titel :
Microelectronic Systems Education, 2001. Proceedings. 2001 International Conference on
Print_ISBN :
0-7695-1156-2
DOI :
10.1109/MSE.2001.932401
