DocumentCode
3221537
Title
A methodology for process design simulators of MEMS based on VRML and Java
Author
Pecheux
Author_Institution
ENSPS/ERM/PHASE, Ilkirch, France
fYear
2001
fDate
17-18 June 2001
Firstpage
24
Lastpage
25
Abstract
The paper presents an efficient way to produce pedagogical, fully interactive and animated 3D process design simulators for MEMS. The aim of such simulators is to make the student learn the logical suite of process design steps that have to be taken to produce correct MEMS. By means of VRML, the learner can visualize the studied MEMS device at any stage of its fabrication from any angle. The associated Java program checks that the actions performed by the student are done in the right order with respect to time.
Keywords
Java; computer based training; electronic design automation; electronic engineering education; micromechanical devices; virtual reality languages; Java; MEMS; VRML; animated 3D process design simulators; process design simulators; process design steps; students; Animation; Computational modeling; Education; Fabrication; Internet; Java; Microelectromechanical devices; Micromechanical devices; Process design; Virtual reality;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Systems Education, 2001. Proceedings. 2001 International Conference on
Print_ISBN
0-7695-1156-2
Type
conf
DOI
10.1109/MSE.2001.932401
Filename
932401
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