DocumentCode
322166
Title
Effective surface permittivity of piezoelectric substrates coated with thin polymer films
Author
Janin, Y. ; Feuillard, G. ; Teston, F. ; Lethiecq, M.
Author_Institution
LUSSIGIP ULTRASONS, Tours, France
Volume
1
fYear
1997
fDate
5-8 Oct 1997
Firstpage
415
Abstract
In this work, an approach based on the effective permittivity concept is developed to model surface acoustic wave (SAW) propagation on a piezoelectric substrate coated with a thin viscoelastic film. In a first step, the effective permittivity is extended to include an elastic layer, taking into account the particle displacements in the film and using appropriate boundary conditions. In a second step, mechanical losses are introduced in the film by means of complex elastic constants. As a consequence, the positions of the zero and the pole of the effective permittivity function, which are related to SAW velocity under free or metallized surface, move from the real axis to the complex plane, allowing to determine attenuation and velocity of the lossy Rayleigh wave
Keywords
Rayleigh waves; elastic moduli; permittivity; polymer films; surface acoustic waves; viscoelasticity; SAW propagation; boundary conditions; bulk moduli; coated with thin polymer films; complex elastic constants; effective surface permittivity; elastic layer; lossy Rayleigh wave attenuation; lossy Rayleigh wave velocity; mechanical losses; partial wave formalism; particle displacements; piezoelectric substrates; pole position; shear moduli; thin viscoelastic film; zero position; Acoustic propagation; Acoustic waves; Boundary conditions; Elasticity; Permittivity; Piezoelectric films; Poles and zeros; Substrates; Surface acoustic waves; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location
Toronto, Ont.
ISSN
1051-0117
Print_ISBN
0-7803-4153-8
Type
conf
DOI
10.1109/ULTSYM.1997.663051
Filename
663051
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