• DocumentCode
    322166
  • Title

    Effective surface permittivity of piezoelectric substrates coated with thin polymer films

  • Author

    Janin, Y. ; Feuillard, G. ; Teston, F. ; Lethiecq, M.

  • Author_Institution
    LUSSIGIP ULTRASONS, Tours, France
  • Volume
    1
  • fYear
    1997
  • fDate
    5-8 Oct 1997
  • Firstpage
    415
  • Abstract
    In this work, an approach based on the effective permittivity concept is developed to model surface acoustic wave (SAW) propagation on a piezoelectric substrate coated with a thin viscoelastic film. In a first step, the effective permittivity is extended to include an elastic layer, taking into account the particle displacements in the film and using appropriate boundary conditions. In a second step, mechanical losses are introduced in the film by means of complex elastic constants. As a consequence, the positions of the zero and the pole of the effective permittivity function, which are related to SAW velocity under free or metallized surface, move from the real axis to the complex plane, allowing to determine attenuation and velocity of the lossy Rayleigh wave
  • Keywords
    Rayleigh waves; elastic moduli; permittivity; polymer films; surface acoustic waves; viscoelasticity; SAW propagation; boundary conditions; bulk moduli; coated with thin polymer films; complex elastic constants; effective surface permittivity; elastic layer; lossy Rayleigh wave attenuation; lossy Rayleigh wave velocity; mechanical losses; partial wave formalism; particle displacements; piezoelectric substrates; pole position; shear moduli; thin viscoelastic film; zero position; Acoustic propagation; Acoustic waves; Boundary conditions; Elasticity; Permittivity; Piezoelectric films; Poles and zeros; Substrates; Surface acoustic waves; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
  • Conference_Location
    Toronto, Ont.
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4153-8
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1997.663051
  • Filename
    663051