Title :
SAW chemical sensors using multiple parameters in decision process
Author :
Hohkawa, K. ; Komine, K. ; Suzuki, H. ; Eguchi, T. ; Noge, S. ; Ikawa, H.
Author_Institution :
Kanagawa Inst. of Technol., Japan
Abstract :
This paper presents results of a basic study for making a highly functional SAW sensor using multiple parameters, such as loss and heating up effects in addition to the parameter of phase, in decision process. We used a porous films of rubber and alumina which have a possibility to enhance these effects. We have studied basic characteristics of devices using these films
Keywords :
adsorption; alumina; chemical sensors; polymer films; porous materials; rubber; surface acoustic wave delay lines; surface acoustic wave resonators; surface acoustic wave sensors; SAW chemical sensors; adsorption characteristics; alumina; chemical interface; decision process; delay line; heating up effects; highly functional SAW sensor; insertion loss; loss effects; multiple parameters; phase change; porous films; resonator; rubber; time dependent variation; Bonding; Chemical sensors; Gas detectors; Optical films; Optical resonators; Optical sensors; Polymer films; Sensor phenomena and characterization; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.663058
