A novel technique of charge centroid evaluation in dielectric films

Summary form only given. An attempt is made to develop a measuring technique for charge density and its centroid evaluation in dielectric layers without metal contacts. The main idea is the utilization of two vibrating probes located on both sides of the investigated dielectric film. The proposed technique has been shown to be effective for different types of dielectric layer without surface traps that could be recharged as the result of touching the mercury contact. The technique can be also used for dielectric films on semiconductor substrates