Title :
Ultrasonic micromanipulator using visual feedback
Author_Institution :
Dept. of Electron. Eng., Tamagawa Univ., Machida, Japan
Abstract :
We have proposed ultrasonic micromanipulation (UMM) techniques for micron-sized particles in liquid based on the radiation forces of very-high-frequency (VHF) ultrasound. In this paper, we report new UMM techniques using visual feedback techniques. To generate VHF ultrasound, a beam-width-compression leaky wave transducer with a frequency of 50 MHz is used. The 50-μm-diameter SiO2 glass sphere and the polystyrene sphere are used as test particles. As an example of two-dimensional manipulation, the transportation of particles along circle and character patterns is demonstrated. The selective trapping of a glass sphere is also shown
Keywords :
CCD image sensors; feedback; interdigital transducers; manipulators; materials handling; microactuators; piezoelectric actuators; robot vision; surface acoustic wave transducers; surface acoustic wave waveguides; 50 MHz; 50 micron; CCD camera; SAW waveguide; SiO2 glass sphere; VHF ultrasound; beam-width-compression leaky wave transducer; character patterns; circular patterns; dynamic image processing; floating-electrode IDT; micron-sized particles in liquid; planar structure; polystyrene sphere; selective trapping; transportation of particles; two-dimensional manipulation; ultrasonic micromanipulator; visual feedback; Acoustic beams; Acoustic transducers; Feedback; Focusing; Glass; Micromanipulators; Substrates; Surface acoustic waves; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.663063
