DocumentCode :
322186
Title :
Towards the determination of elastic constants on a submicron scale using scanning acoustic force microscopy
Author :
Hesjedal, T. ; Chilla, E. ; Fröhlich, H.J.
Author_Institution :
Paul-Drude-Inst. for Solid-State Electron., Berlin, Germany
Volume :
1
fYear :
1997
fDate :
5-8 Oct 1997
Firstpage :
549
Abstract :
This paper reports first steps towards the determination of elastic constants with submicron lateral resolution. The experimental phase velocity dispersion data were obtained on a micron scale using scanning acoustic force microscopy. The minimum of the corresponding error field is only weakly localized, thus giving a large error for the elastic constants. The localization can not be increased by using more of data points. In order to decrease the elastic constant´s error, a Love mode is additionally regarded. However, the error field crossing is in this case not leading to a significant increase of the accuracy. We propose the inclusion of further surface guided modes
Keywords :
Love waves; acoustic microscopy; atomic force microscopy; elastic constants; measurement errors; surface acoustic waves; ultrasonic velocity; Love mode; elastic constants; error field; phase velocity dispersion; scanning acoustic force microscopy; submicron lateral resolution; submicron scale; surface guided modes; Acoustic measurements; Acoustic signal detection; Dispersion; Force measurement; Microscopy; Phase detection; Phase measurement; Surface acoustic waves; Ultrasonic variables measurement; Velocity measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
ISSN :
1051-0117
Print_ISBN :
0-7803-4153-8
Type :
conf
DOI :
10.1109/ULTSYM.1997.663081
Filename :
663081
Link To Document :
بازگشت