Title :
A smart H2 sensor array of QCMs coated with PdNi alloy of various thicknesses
Author :
Liu, G. ; Porter, M.D. ; Bastiaans, G.J. ; Burns, S.
Author_Institution :
USDOE, Ames, IA, USA
fDate :
31 May-2 Jun 1995
Abstract :
This paper describes some of our results in developing high performance hydrogen gas sensors using piezoelectric devices (i.e., Quartz Crystal Microbalances (QCMs) and Thin Film Resonators (TFRs)) coated with a PdNi (90/10) alloy. A sensor array has been built by coating quartz crystals with various PdNi thicknesses and tested via exposure to H2 in N2 in the concentration range from 20 to 500 ppm. The performance of the sensor array has been also characterized in the presence of various potential interference gases and vapors, such as carbon dioxide, nitrous oxide, water, toluene, acetone, acetonitrile, hexane, methyl isobutylketone, methylene chloride, and ethanol. Using the unique chemistry of Pd-H2 system, we have developed an relatively straightforward method to compensate for contributions from the mentioned potential interference gases
Keywords :
crystal resonators; gas sensors; hydrogen; intelligent sensors; microbalances; quartz; H2; PdNi; QCMs; SiO2; gas sensors; interference gases; piezoelectric devices; quartz crystal microbalances; smart sensor array; thin film resonators; Gas detectors; Gases; Hydrogen; Interference; Piezoelectric devices; Piezoelectric films; Sensor arrays; Sensor phenomena and characterization; Thin film devices; Thin film sensors;
Conference_Titel :
Frequency Control Symposium, 1995. 49th., Proceedings of the 1995 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-2500-1
DOI :
10.1109/FREQ.1995.484098
