Title :
Tip scanning dynamic SFM using piezoelectric cantilever for full wafer inspection
Author :
Chu, J. ; Maeda, R. ; Itoh, T. ; Suga, T.
Author_Institution :
Mech. Eng. Lab., AIST/MITI, Ibaraki, Japan
Abstract :
The dynamic scanning force microscope (DSFM) has proven itself as a versatile instrument for science and technology. It has made possible the measurement of surface structures with sizes ranging from a single atom to several micrometers. But practically, the samples to be inspected are often too big to fit the SFM sample stage of traditional SFM systems. In this report, we propose a new structure of DSFM compatible with full wafer inspection.
Keywords :
atomic force microscopy; inspection; semiconductor device testing; surface structure; SFM sample stage; dynamic scanning force microscope; full wafer inspection; piezoelectric cantilever; surface structures; tip scanning dynamic SFM; Atomic measurements; Electrodes; Force sensors; Gold; Inspection; Instruments; Mechanical engineering; Piezoelectric films; Resonance; Scanning electron microscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1999. Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International
Conference_Location :
Yokohama, Japan
Print_ISBN :
4-930813-97-2
DOI :
10.1109/IMNC.1999.797528
