Title :
Contact mode ultrasonic microscopy
Author :
Pajewski, W. ; Kielczyski, P. ; Szalewski, M. ; Gutkiewicz, P.
Author_Institution :
Inst. of Fund. Technol. Res., Polish Acad. of Sci., Warsaw, Poland
Abstract :
By applying piezoelectric sensors (bimorphs or monomorphs) in Scanning Acoustic Microscopy, a considerable simplification of the measurement set-up was achieved, i.e., a complex optical method of measuring cantilever vibrations was replaced by the piezoelectric method. As an innovation we applied a direct contact between the cantilever tip and the investigated surface. The electric voltage generated by those sensors was proportional to the cantilever deflection. The developed model of scanning ultrasonic contact microscope was used to investigate the surface properties of VLSI integrated circuits (EPROM memories) and PZT ceramics
Keywords :
acoustic microscopy; piezoelectric transducers; ultrasonic imaging; EPROM memory; PZT; PZT ceramic; PbZrO3TiO3; VLSI integrated circuit; bimorph; cantilever tip vibration measurement; contact mode ultrasonic microscopy; monomorph; piezoelectric sensor; scanning acoustic microscopy; surface properties; Acoustic measurements; Acoustic sensors; Integrated circuit modeling; Optical microscopy; Optical sensors; Technological innovation; Ultrasonic variables measurement; Very large scale integration; Vibration measurement; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.663128
