Title :
The design of a miniature injector for microengineered GC system
Author :
Wiranto, Goib ; Soegandi, Totok M S ; Muljono, Moch ; Widodo, Slamet ; Hermida, I. Dewa Putu
Author_Institution :
Microelectron. Lab, TELKOMA-LIPI, Bandung, Indonesia
Abstract :
This paper describes the design and fabrication of a miniature injector for microengineered gas chromatography (GC) system. Both the injector and the micro GC are to be fabricated on silicon using microengineering technology. The injector system incorporates four miniature valves interconnected using short microchannels such that a total of 4 nl sample can be injected into the microengineered GC column. This device should also find wide applications in the area of microfluidic systems
Keywords :
chemical sensors; chromatography; design engineering; elemental semiconductors; microactuators; microfluidics; micromachining; microsensors; microvalves; silicon; Si; injector system; microengineered GC column; microengineered GC system; microengineered gas chromatography system; microengineering technology; microfluidic systems; miniature injector; miniature injector design; miniature valves; short microchannel interconnection; silicon; Actuators; Fabrication; Gas chromatography; Laboratories; Microchannel; Microelectronics; Microfluidics; Microvalves; Silicon; Valves;
Conference_Titel :
Semiconductor Electronics, 2000. Proceedings. ICSE 2000. IEEE International Conference on
Conference_Location :
Guoman Port Dickson Resort
Print_ISBN :
0-7803-6430-9
DOI :
10.1109/SMELEC.2000.932439
