Title :
High frequency longitudinal-transverse complex vibration systems for ultrasonic wire bonding
Author :
Tsujino, Jirornaru ; Yoshihara, Hiroyuki ; Kamimoto, Kazuyoshi ; Osada, Yoshiaki
Author_Institution :
Fac. of Eng., Kanagawa Univ., Yokohama, Japan
Abstract :
High frequency longitudinal to transverse complex vibration systems of 160 kHz to 1 MHz for ultrasonic wire ball bonding for IC or LSI are studied. Vibration systems of these high frequency and complex vibration welding equipments consist of transverse free-free complex vibration rod 7.0 mm in diameter, two longitudinal vibration systems for driving the transverse vibration rod and a ceramic capillary 1.5875 mm in diameter. Vibration distribution of capillary at high frequency up to 1 MHz is measured at the first time and the conventional capillary is revealed applicable at such high frequencies
Keywords :
large scale integration; lead bonding; ultrasonic welding; vibrations; 160 kHz to 1 MHz; IC; LSI; ceramic capillary; high frequency longitudinal-transverse complex vibration system; rod; ultrasonic wire ball bonding; vibration welding; Bonding; Ceramics; Frequency; Large scale integration; Laser modes; UHF integrated circuits; Vibration measurement; Vibrometers; Welding; Wire;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.663146
