• DocumentCode
    322237
  • Title

    High frequency longitudinal-transverse complex vibration systems for ultrasonic wire bonding

  • Author

    Tsujino, Jirornaru ; Yoshihara, Hiroyuki ; Kamimoto, Kazuyoshi ; Osada, Yoshiaki

  • Author_Institution
    Fac. of Eng., Kanagawa Univ., Yokohama, Japan
  • Volume
    1
  • fYear
    1997
  • fDate
    5-8 Oct 1997
  • Firstpage
    849
  • Abstract
    High frequency longitudinal to transverse complex vibration systems of 160 kHz to 1 MHz for ultrasonic wire ball bonding for IC or LSI are studied. Vibration systems of these high frequency and complex vibration welding equipments consist of transverse free-free complex vibration rod 7.0 mm in diameter, two longitudinal vibration systems for driving the transverse vibration rod and a ceramic capillary 1.5875 mm in diameter. Vibration distribution of capillary at high frequency up to 1 MHz is measured at the first time and the conventional capillary is revealed applicable at such high frequencies
  • Keywords
    large scale integration; lead bonding; ultrasonic welding; vibrations; 160 kHz to 1 MHz; IC; LSI; ceramic capillary; high frequency longitudinal-transverse complex vibration system; rod; ultrasonic wire ball bonding; vibration welding; Bonding; Ceramics; Frequency; Large scale integration; Laser modes; UHF integrated circuits; Vibration measurement; Vibrometers; Welding; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
  • Conference_Location
    Toronto, Ont.
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-4153-8
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1997.663146
  • Filename
    663146